Conference Publication Details
Mandatory Fields
OSullivan, BJ and Hurley, PK and Mathewson, A and Beanland, R and Rodrigues, R and Kay, P
Solid-State Device Research Conference, 1999. Proceeding of the 29th European
The Effect of Oxide Patterned Layers on the Rapid Thermal Oxidation of Polycrystalline Silicon
1999
January
Validated
()
Optional Fields
424
427
Grant Details