Conference Publication Details

Mandatory Fields

Authors

O'Mahony, Conor and Hill, Martin and Mathewson, Alan

Conference Title

OPTO Ireland

Title of Paper

Analysis of material properties for MEMS using interferometric measurements

Year

2003

Month

January

Status

Validated

Peer Reviewed

Times Cited

()

Optional Fields

Keywords

Editors

Start Page

712

End Page

722

Location

Start Date

End Date

Abstract

Funded By

URL

DOI Link

Grant Details

Funding Body

Grant Details