Conference Contribution Details
Mandatory Fields
Martyn Pemble and the other PIs and students on the FORME Cluster
ALD 2011
Invited Presentation entitled The Nature of the III-V/Oxide Interface and its Impact on the ALD Growth of High-k Dielectrics for Advanced CMOS
Cambridge, Massachussetts
Invited Lectures (Conference)
2011
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0
Optional Fields
25-JUN-11
29-JUN-11
The Nature of the III-V/Oxide Interface and its Impact on the ALD Growth of High-k Dielectrics for Advanced CMOS
SFI and AVS