Mandatory Fields

Contributor (s)

Martyn Pemble

Conference Title

Electrochemical Society Meeting

Short Description

Invited Presentation entitled Developments in the understanding of ALD processes and applications of ALD in critical technologies:

Location

Washington DC

Contribution Type

Invited Lectures (Conference)

Year

2007

Times Cited

()

Peer Reviewed

Optional Fields

Start Date

07-OCT-07

End Date

12-OCT-07

Abstract

Developments in the understanding of ALD processes and applications of ALD in critical technologies:

Funded By

SFI and ECS