Conference Contribution Details

Mandatory Fields

Contributor (s)

Martyn Pemble

Conference Title

ALD 2007 AVS Meeting

Short Description

ALD 2007 AVS Meeting Invited Presentation entitled Infrared Studies of ALD and CVD Processes

Location

San Diego

Contribution Type

Invited Lectures (Conference)

Year

2007

Times Cited

()

Peer Reviewed

0

Optional Fields

Start Date

25-JUN-07

End Date

28-JUN-07

Abstract

Infrared Studies of ALD and CVD Processes

Funded By

SFI