Mandatory Fields

Contributor (s)

Aileen O'Mahony (Martyn Pemble) et al.

Conference Title

ALD 8

Short Description

Poster presentation entitled Atomic Layer Deposition of HfO2 Thin Films on InxGa1-xAs:

Location

Bruges

Contribution Type

Poster Presentation

Year

2008

Times Cited

()

Peer Reviewed

Optional Fields

Start Date

19-JUN-08

End Date

02-JUL-08

Abstract

Atomic Layer Deposition of HfO2 Thin Films on InxGa1-xAs: Influence of In concentration and surface passivation

Funded By

SFI, AVS