Conference Contribution Details

Mandatory Fields

Contributor (s)

Aileen O'Mahony, Ian Povey and Martyn Pemble

Conference Title

ALD 8

Short Description

Poster Presentation entitled Infrared spectroscopy as a probe of ALD processes

Location

Bruges

Contribution Type

Poster Presentation

Year

2008

Times Cited

()

Peer Reviewed

0

Optional Fields

Start Date

29-JUN-08

End Date

02-JUL-08

Abstract

Infrared spectroscopy as a probe of ALD processes

Funded By

SFI, AVS