Mandatory Fields

Contributor (s)

Martyn Pemble

Conference Title

Joint Equipment and Materials Initiative (JEMI) meeting

Short Description

Invited Presentation : ALD Growth of High-k Dielectrics on III-V Substrates for Next-Generation CMOS

Location

University of Liverpool

Contribution Type

Invited Lectures (Workshops)

Year

2011

Times Cited

()

Peer Reviewed

Optional Fields

Start Date

22-SEP-11

End Date

22-SEP-11

Abstract

Funded By

JEMI (Joint Equipment and Materials Initiative (JEMI) meeting)