Conference Publication Details

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Authors

Houlihan, R.,Olszewski, O. Z.,Duane, R.,O'Mahony, C.,Collins, P.,Mathewson, A.

Conference Title

Micromechanics Europe 2009, Toulouse, France, Sept. 2009

Title of Paper

System-Level Reliability of a Capacitive MEMS Switch

Year

2009

Month

January

Status

Validated

Peer Reviewed

Times Cited

()

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