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Authors

Whatmore, RW and Zhang, Q and Huang, Z and Dorey, RA

Year

2002

Month

January

Journal

Materials Science in Semiconductor Processing

Title

Ferroelectric thin and thick films for microsystems

Status

Validated

Peer Reviewed

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Keywords

Volume

5

Issue

2

Start Page

65

End Page

76

Abstract

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ISBN / ISSN

Edition

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