Huang, Zhaorong and Zhang, Qi and Corkovic, Silvana and Dorey, RA and Duval, F and Leighton, Glen and Wright, R and Kirby, P and Whatmore, RW

2006

January

Journal of electroceramics

Piezoelectric PZT films for MEMS and their characterization by interferometry

Validated

17

2-4

549

556