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Authors

Marson, S and Dorey, Robert A and Zhang, Qi and Whatmore, Roger W

Year

2003

Month

January

Journal

Integrated Ferroelectrics

Title

Thick PZT micro-features obtained by direct patterning of photosensitive precursor solution

Status

Validated

Peer Reviewed

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Keywords

Volume

54

Issue

1

Start Page

585

End Page

593

Abstract

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Publisher

ISBN / ISSN

Edition

URL

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