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Authors

Corkovic, S and Whatmore, RW and Zhang, Q

Year

2007

Month

January

Journal

Integrated Ferroelectrics

Title

Sol-gel fabrication of PZT thick films for MEMS

Status

Validated

Peer Reviewed

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Keywords

Volume

88

Issue

1

Start Page

93

End Page

102

Abstract

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ISBN / ISSN

Edition

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