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Authors

Abad, E and Whatmore, RW and Zhang, Q and Huang, Z

Year

2003

Month

January

Journal

PROCEEDINGS-SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING

Title

Soft lithographic patterning of oxide thin films [5116-23]

Status

Validated

Peer Reviewed

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Keywords

Volume

Issue

1

Start Page

176

End Page

184

Abstract

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Edition

URL

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