Sala\"un, Amelie and Newcomb, Simon B and Povey, Ian M and Sala\"un, Mathieu and Keeney, Lynette and O'Mahony, Aileen and Pemble, Martyn E

2011

January

Chemical Vapor Deposition

Nucleation and Chemical Transformation of RuO2 Films Grown on (100) Si Substrates by Atomic Layer Deposition

Validated

17

4-6

114

122