Conference Contribution Details

Mandatory Fields

Contributor (s)

Martyn Pemble

Conference Title

UK CVD Network Meeting

Short Description

Invited Presentation: Atomic Layer Deposition of high-k Dielectrics on III-V Substrates for Next Generation CMOS

Location

University of Salford UK

Contribution Type

Invited Lectures (Workshops)

Year

2011

Times Cited

()

Peer Reviewed

0

Optional Fields

Start Date

06-JAN-11

End Date

Abstract

Funded By

SFI