Dubourdieu, C and Roussel, H and Jimenez, C and Audier, M and S\'enateur, JP and Lhostis, S and Auvray, L and Ducroquet, F and O'sullivan, BJ and Hurley, PK and others

2005

January

Materials Science and Engineering: B

Pulsed liquid-injection MOCVD of high-K oxides for advanced semiconductor technologies

Validated

118

1

105

111