Conference Publication Details

Mandatory Fields

Authors

N.Jackson, Z. Olszewski, L, Keeney, A. Blake, A. Mathewson

Conference Title

28th ICMTS Conference

Title of Paper

A capacitive based Piezoelectric AlN Film Quality Test Structure

Year

2015

Month

January

Status

Published

Peer Reviewed

1

Times Cited

()

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Keywords

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End Page

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End Date

Abstract

Funded By

URL

http://icmts2015.pdf.com/

DOI Link

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