Xiong, Weize and Gebara, Gabriel and Zaman, Joyti and Gostkowski, Michael and Nguyen, Billy and Smith, Greg and Lewis, David and Cleavelin, C Rinn and Wise, Rick and Yu, Shaofeng and others

2004

January

Improvement of FinFET electrical characteristics by hydrogen annealing

Validated

()

25

8

541

543