Peer-Reviewed Journal Details

Mandatory Fields

Authors

Colinge, Jean Pierre and Diaz, Carlos H

Year

2002

Month

May

Journal

Title

Method of fabricating a silicon-on-insulator semiconductor device with an implanted ground plane

Status

Validated

Times Cited

()

Optional Fields

Keywords

Volume

Issue

Start Page

End Page

Abstract

US Patent 6,391,752

Publisher Location

ISBN / ISSN

Edition

URL

DOI Link

Grant Details

Funding Body

Grant Details