Peer-Reviewed Journal Details

Mandatory Fields

Authors

Colinge, JP and Demoulin, E and Delannay, Francis and Lobet, M and Temerson, JM

Year

1981

Month

January

Journal

Title

Grain size and resistivity of LPCVD polycrystalline silicon films

Status

Validated

Times Cited

()

Optional Fields

Keywords

Volume

128

Issue

9

Start Page

2009

End Page

2014

Abstract

Publisher Location

ISBN / ISSN

Edition

URL

DOI Link

Grant Details

Funding Body

Grant Details