Peer-Reviewed Journal Details

Mandatory Fields

Authors

Kamins, TI and Colinge, JP

Year

1986

Month

January

Journal

Title

Thickness determination for silicon-on-insulator structures

Status

Validated

Times Cited

()

Optional Fields

Keywords

Volume

22

Issue

23

Start Page

1236

End Page

1237

Abstract

Publisher Location

ISBN / ISSN

Edition

URL

DOI Link

Grant Details

Funding Body

Grant Details