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Authors

Patruno, Paul and Kostrzewa, Marek and Landry, K and Xiong, Weize and Cleavelin, CR and Hsu, Che-Hua and Ma, M and Colinge, J

Conference Title

SOI Conference, 2007 IEEE International

Title of Paper

Study of Fin Profiles and MuGFETs built on SOI Wafers with a Nitride-Oxide Buried Layer (NOx-BL) as the Buried Insulator Layer

Year

2007

Month

January

Status

Validated

Peer Reviewed

Times Cited

()

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