Peer-Reviewed Journal Details

Mandatory Fields

Authors

Chen, Jian and Colinge, Jean-Pierre

Year

1997

Month

January

Journal

Title

Study on titanium salicide process for thin-film SOI devices

Status

Validated

Times Cited

()

Optional Fields

Keywords

Volume

33

Issue

1

Start Page

189

End Page

194

Abstract

Publisher Location

ISBN / ISSN

Edition

URL

DOI Link

Grant Details

Funding Body

Grant Details