Peer-Reviewed Journal Details

Mandatory Fields

Authors

Smeys, P and Magnusson, U and Colinge, JP

Year

1992

Month

January

Journal

Title

Correlation between spectroscopic reflectrometry and electrical measurements of SIMOX SOI film thickness

Status

Validated

Times Cited

()

Optional Fields

Keywords

Volume

19

Issue

1

Start Page

823

End Page

826

Abstract

Publisher Location

ISBN / ISSN

Edition

URL

DOI Link

Grant Details

Funding Body

Grant Details