Peer-Reviewed Journal Details

Mandatory Fields

Authors

Chen, Jian and Colinge, J-P

Year

1995

Month

January

Journal

Title

Tungsten metallization technology for high temperature silicon-on-insulator devices

Status

Validated

Times Cited

()

Optional Fields

Keywords

Volume

29

Issue

1

Start Page

18

End Page

20

Abstract

Publisher Location

ISBN / ISSN

Edition

URL

DOI Link

Grant Details

Funding Body

Grant Details