Mandatory Fields

Authors

Yu, Ran and Das, Samaresh and Hobbs, Richard and Georgiev, Yordan and Ferain, Isabelle and Razavi, Pedram and Akhavan, Nima Dehdashti and Colinge, Cynthia A and Colinge, J

Conference Title

Ultimate Integration on Silicon (ULIS), 2012 13th International Conference on

Title of Paper

Top-down process of Germanium nanowires using EBL exposure of Hydrogen Silsesquioxane resist

Year

2012

Month

January

Status

Validated

Peer Reviewed

Times Cited

()

Optional Fields

Keywords

Editors

Start Page

145

End Page

148

Location

Start Date

End Date

Abstract

Funded By

URL

DOI Link

Grant Details

Funding Body

Grant Details