Peer-Reviewed Journal Details

Mandatory Fields

Authors

Smeys, P and Magnusson, U and Colinge, JP

Year

1993

Month

January

Journal

Title

Non-destructive characterisation of SOI wafers using spectroscopic reflectrometry

Status

Validated

Times Cited

()

Optional Fields

Keywords

Volume

36

Issue

8

Start Page

1213

End Page

1216

Abstract

Publisher Location

ISBN / ISSN

Edition

URL

DOI Link

Grant Details

Funding Body

Grant Details