Peer-Reviewed Journal Details

Mandatory Fields

Authors

Colinge, Jean-Pierre and Xiong, Weize

Year

2007

Month

August

Journal

Title

Short channel semiconductor device fabrication

Status

Validated

Times Cited

()

Optional Fields

Keywords

Volume

Issue

Start Page

End Page

Abstract

US Patent 7,253,043

Publisher Location

ISBN / ISSN

Edition

URL

DOI Link

Grant Details

Funding Body

Grant Details