Mandatory Fields

Authors

Chen, J and Colinge, Jean-Pierre and Flandre, Denis and Nguyen, B-Y and Hegde, R and Rai, R and others

Conference Title

Conference HITEN 1997

Title of Paper

Formation of TiN/CoSi2 barrier layer on thin-film SOI for high-temperature applications

Year

1997

Month

January

Status

Validated

Peer Reviewed

Times Cited

()

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Keywords

Editors

Start Page

End Page

Location

Start Date

End Date

Abstract

Funded By

URL

DOI Link

Grant Details

Funding Body

Grant Details