Koleśnik-Gray, M. M.; Sorger, C.; Biswas, S.; Holmes, J. D.; Weber, H. B.; Krstić, V.

2015

May

Applied Physics Letters

In operandi observation of dynamic annealing: a case study of boron in germanium nanowire devices

Published

WOS: 4 ()

106

23

233109(1)

233109(4)

We report on the implantation of boron in individual, electrically contacted germanium nanowires with varying diameter and present a technique that monitors the electrical properties of a single device during implantation of ions. This method gives improved access to study the dynamic annealing ability of the nanowire at room temperature promoted by its quasi-one-dimensional confinement. Based on electrical data, we find that the dopant activation efficiency is nontrivially diameter dependent. As the diameter decreases, a transition from a pronounced dynamic-annealing to a radiation-damage dominated regime is observed.

New York, USA

http://scitation.aip.org/content/aip/journal/apl;jsessionid=4ofg3ij3t6qdn.x-aip-live-06

10.1063/1.4922527