Koleśnik-Gray, M. M.; Sorger, C.; Biswas, S.; Holmes, J. D.; Weber, H. B.; Krstić, V.

2015

May

Applied Physics Letters

In operandi observation of dynamic annealing: a case study of boron in germanium nanowire devices

Published

()

106

23

233109(1)

233109(4)

We report on the implantation of boron in individual, electrically contacted germanium nanowires with varying diameter and present a technique that monitors the electrical properties of a single device during implantation of ions. This method gives improved access to study the dynamic annealing ability of the nanowire at room temperature promoted by its quasi-one-dimensional confinement. Based on electrical data, we find that the dopant activation efficiency is nontrivially diameter dependent. As the diameter decreases, a transition from a pronounced dynamic-annealing to a radiation-damage dominated regime is observed.

New York, USA

http://scitation.aip.org/content/aip/journal/apl;jsessionid=4ofg3ij3t6qdn.x-aip-live-06

10.1063/1.4922527