Mandatory Fields

Authors

Nathan Jackson, Oskar Z Olszewski, Lynette Keeney, Alan Blake, Alan Mathewson

Conference Title

International Conference on Microelectronic Test Structures (ICMTS), 2015

Title of Paper

A capacitive based piezoelectric AlN film quality test structure

Year

2015

Month

March

Status

Published

Peer Reviewed

Times Cited

()

Optional Fields

Keywords

Editors

Start Page

193

End Page

197

Location

Start Date

23-MAR-15

End Date

Abstract

Funded By

URL

DOI Link

Grant Details

Funding Body

Grant Details