Mandatory Fields

Authors

Olszewski, OZ;Houlihan, R;O'Keeffe, R;O'Neill, M;Waldron, F;Mathewson, A;Jackson, N

Conference Title

28TH EUROPEAN CONFERENCE ON SOLID-STATE TRANSDUCERS (EUROSENSORS 2014)

Title of Paper

A MEMS silicon-based piezoelectric AC current sensor

Year

2014

Month

January

Status

Validated

Peer Reviewed

Times Cited

WOS: 19 ()

Optional Fields

Keywords

Editors

Start Page

1457

End Page

1460

Location

Start Date

End Date

Abstract

This paper describes a MEMS silicon-based piezoelectric AC current sensor that can be used to monitor the energy usage in an electric infrastructure. The overall device concept relies on a silicon cantilever that incorporates a permanent magnet in its mass and that is covered by a thin layer of piezoelectric material. When brought close to an AC current carrying wire, the magnet couples to the AC magnetic field from the conductor, causing the device to vibrate at the frequency of the AC signal. In contrast to previous work, the device in this paper operates at the resonance frequency for improved device response. (C) 2014 Published by Elsevier Ltd.

Funded By

URL

DOI Link

10.1016/j.proeng.2014.11.724

Grant Details

Funding Body

Grant Details