OSULLIVAN, P;NAUGHTON, F;BENZ, HT;FERNHOLZ, G;HAESELER, S;MATHEWSON, A

ESSDERC '93 - PROCEEDINGS OF THE 23RD EUROPEAN SOLID-STATE DEVICE RESEARCH CONFERENCE

EFFECT OF POLYSILICON DOPING AND OXIDATION CONDITIONS ON TUNNEL OXIDE PERFORMANCE FOR EEPROM DEVICES

1993

January

Validated

1

()

583

586