Mandatory Fields

Authors

Moran, S;Hurley, PK;Mathewson, A

Conference Title

ICMTS 1996 - 1996 IEEE INTERNATIONAL CONFERENCE ON MICROELECTRONIC TEST STRUCTURES, PROCEEDINGS

Title of Paper

Test structure for investigating activated doping concentrations in polycrystalline silicon

Year

1996

Month

January

Status

Validated

Peer Reviewed

Times Cited

()

Optional Fields

Keywords

Editors

Start Page

217

End Page

220

Location

Start Date

End Date

Abstract

Funded By

URL

DOI Link

Grant Details

Funding Body

Grant Details