Mandatory Fields

Authors

Jackson, N;Olszewski, OZ;Keeney, L;Blake, A;Mathewson, A

Conference Title

PROCEEDINGS OF THE 2015 IEEE INTERNATIONAL CONFERENCE ON MICROELECTRONIC TEST STRUCTURES (ICMTS 2015)

Title of Paper

A Capacitive based Piezoelectric AlN Film Quality Test Structure

Year

2015

Month

January

Status

Validated

Peer Reviewed

Times Cited

WOS: 7 ()

Optional Fields

Keywords

THIN-FILMS COEFFICIENT MEASUREMENT ALUMINUM NITRIDE

Editors

Start Page

193

End Page

197

Location

Start Date

End Date

Abstract

Aluminwn nitride (AlN) is a piezoelectric material that is commonly used in various MEMS applications. However, determining the properties of the thin film typically requires multiple test structures, and there are various methods for obtaining the piezoelectric properties. This paper highlights the development of a capacitive based test structure that is capable of determining the different material properties. In addition this paper compares various test methods used to determine the piezoelectric properties of AlN.

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