Chen, WB;McCarthy, KG;Copuroglu, M;O'Brien, S;Winfield, R;Mathewson, A

2012

May

Thin Solid Films

Temperature behavior of electrical properties of high-k lead-magnesium-niobium titanate thin-films

Validated

Altmetric: 1 ()

520

4523

4526

This paper reports on the temperature dependence of the electrical properties of high-k lead-magnesium-niobium titanate thin films processed with different compositions (with and without nanoparticles) and with different annealing temperatures (450 degrees C and 750 degrees C). These characterization results support the ongoing investigation of the material's electrical properties which are necessary before the dielectric can be used in silicon-based IC applications. (C) 2011 Elsevier B.V. All rights reserved.

LAUSANNE

0040-6090

10.1016/j.tsf.2011.12.037