Conference Publication Details
Mandatory Fields
Kulkarni, S;Koukharenko, E;Tudor, J;Beeby, S;O'Donnell, T;Roy, S
TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2
Fabrication and test of integrated micro-scale vibration based electromagnetic generator
2007
January
Validated
1
()
Optional Fields
SYSTEMS
444
445
This paper discusses the design, fabrication and testing of electromagnetic microgenerators on silicon. Two different designs of power generators are micro-fabricated, Prototype A having a wire-wound copper coil and Prototype B, an electrodeposited copper coil both on a Deep Reactive Ion etched (DRIE) silicon paddle. The devices were fabricated using standard Micro-Electro-Mechanical Systems (MEMS) processing techniques. For Prototype A, the maximum measured power output was 148 nW at 8.08 kHz resonant frequency and 3.9 M/S-2 acceleration. For prototype B, the microgenerator gave a maximum load power of 23 nW for an acceleration of 9.8 M/S-2, at a resonant frequency of 9.83 kHz.
Grant Details