Conference Publication Details
Mandatory Fields
Wang, N;O'Donnell, T;Roy, S;McCloskey, P;O'Mathuna, C
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS
Micro-inductors integrated on silicon for power supply on chip
2007
September
Validated
1
WOS: 66 ()
Optional Fields
DC-DC CONVERTER PLANAR INDUCTOR MICROINDUCTORS CORES
233
237
This paper discusses the technologies required to produce magnetics on silicon for power supply on chip. Prototypes of micro-inductors have been fabricated using techniques such as thick copper coil deposition and improved magnetic materials. The measured maximum Q factor and inductance value are 5 at 2.5 MHz and 38 nH/mm(2), respectively. The impact of seed layers and core overlap has been identified to be significant at high frequencies. Using the validated analytical model, the electrical performance of micro-inductors in a buck converter can be predicted and efficiency of 85.9 with a power density of 15.8 W/cm(2) can be achieved. (c) 2007 Elsevier B.V. All rights reserved.
10.1016/j.jmmm.2007.02.098
Grant Details