Mandatory Fields

Authors

Wang, N;O'Donnell, T;Roy, S;McCloskey, P;O'Mathuna, C

Conference Title

JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS

Title of Paper

Micro-inductors integrated on silicon for power supply on chip

Year

2007

Month

September

Status

Validated

Peer Reviewed

Times Cited

WOS: 73 ()

Optional Fields

Keywords

DC-DC CONVERTER PLANAR INDUCTOR MICROINDUCTORS CORES

Editors

Start Page

233

End Page

237

Location

Start Date

End Date

Abstract

This paper discusses the technologies required to produce magnetics on silicon for power supply on chip. Prototypes of micro-inductors have been fabricated using techniques such as thick copper coil deposition and improved magnetic materials. The measured maximum Q factor and inductance value are 5 at 2.5 MHz and 38 nH/mm(2), respectively. The impact of seed layers and core overlap has been identified to be significant at high frequencies. Using the validated analytical model, the electrical performance of micro-inductors in a buck converter can be predicted and efficiency of 85.9 with a power density of 15.8 W/cm(2) can be achieved. (c) 2007 Elsevier B.V. All rights reserved.

Funded By

URL

DOI Link

10.1016/j.jmmm.2007.02.098

Grant Details

Funding Body

Grant Details