Conference Publication Details
Mandatory Fields
Barsony, I;Furjes, P;Adam, M;Ducso, C;Vizvary, Z;Zettner, J;Stam, F
SENSORS AND ACTUATORS B-CHEMICAL
Thermal response of microfilament heaters in gas sensing
2004
September
Validated
1
WOS: 13 ()
Optional Fields
THERMOGRAPHY
442
447
IR thermal imaging in the wavelength range of 3 mum < lambda < 5 mum with a comparable lateral pixel resolution had been used to study the dynamic behaviour of porous silicon micromachined, membrane-type microfilament structures for gas sensing application. Three types of the heater structures, realised with different thermal isolation, were investigated and modelled by equivalent circuits. (C) 2004 Elsevier B.V. All rights reserved.
10.1016/j.snb.2004.05.003
Grant Details