Conference Contribution Details

Mandatory Fields

Contributor (s)

Sheehan, E.; Mathewson, A.; Kalnitsky, A.; Hurley, P. K.; Lepert, A.; Mallardeau, C.;

Conference Title

Proceeding. ESSDERC 95, The Hague

Short Description

*

Location

Phosphorus In The Polysilicon-TiSi2 System: Dopant Redistribution [B2736]

Contribution Type

N/A

Year

2003

Times Cited

()

Peer Reviewed

Optional Fields

Start Date

01-JAN-03

End Date

30-DEC-99

Abstract

Funded By

*