Mandatory Fields

Authors

J. C. Jackson, A. P. Morrison , P. Hurley, W. R. Harrell, D. Damjanovic, B. Lane, and A. Mathewson.;

Conference Title

IEEE International Conference on Microelectronic Test-structures, (ICMTS 2001)

Title of Paper

Process monitoring and defect characterization with single photon avalanche diodes

Year

2001

Month

March

Status

Published

Peer Reviewed

Times Cited

()

Optional Fields

Keywords

Editors

Start Page

End Page

Location

Kobe, Japan

Start Date

19-MAR-01

End Date

22-MAR-01

Abstract

Funded By

URL

DOI Link

Grant Details

Funding Body

Grant Details