Daunt, CLM;Yang, H;Han, W;Thomas, K;Pelucchi, E;Corbett, B;Peters, FH

2012

July

IEEE Photonics Technology Letters

Dielectric-Free Fabrication of Compact 30-GHz Photodetectors Using the Isolated Pedestal Contact Configuration

Validated

WOS: 2 ()

24

1082

1084

We demonstrate a rapid fabrication process for high-speed waveguide-based photodetectors operating above 30 GHz. The process requires no dielectric planarization, and forms planar ground-signal-ground (GSG) contacts, which is more robust and ideally suitable for flip-chip packaging.

PISCATAWAY

1041-1135

10.1109/LPT.2012.2194484