Farrell, RA,Petkov, N,Cherkaoui, K,Amenitsch, H,Holmes, JD,Hurley, PK,Morris, MA;

2008

August

Chemphyschem

Facile and controlled synthesis of ultra-thin low dielectric constant meso/microporous silica films

Validated

()

microporous materials nanoparticles self-assembly thin films zeolites LOW-K DIELECTRICS ZEOLITE SUSPENSIONS

9

1524

1527

DOI 10.1002/cphc.200800158