Peer-Reviewed Journal Details

Mandatory Fields

Authors

DONNELLY, J,ONEILL, B,MATHEWSON, A;

Year

1989

Month

September

Journal

Surface Science

Title

CHARACTERIZATION OF FURNACE-ANNEALED TISI2 FOR VLSI CIRCUIT APPLICATIONS

Status

Validated

Times Cited

()

Optional Fields

Keywords

Volume

38

Issue

Start Page

447

End Page

457

Abstract

Publisher Location

ISBN / ISSN

Edition

URL

DOI Link

Grant Details

Funding Body

Grant Details