Conference Publication Details
Mandatory Fields
Byun K.;Hayes J.;Gity F.;Corbett B.;Colinge C.
Materials Research Society Symposium Proceedings
Wafer bonded Ge-Si heterostructure for avalanche photodiode application
2011
December
Validated
1
Scopus: 1 ()
Optional Fields
38
43
In this study, we investigate directly bonded germanium-silicon interfaces to facilitate the development of high quality germanium silicon integration for Avalanche photodiode application. Angle resolved x-ray photoelectron spectroscopy data is presented which provides the chemical composition of the germanium surfaces as a function of the surface passivation. The hetero-structure is characterized by measuring forward and reverse current and comparing the measured results to TCAD simulation. The physical structure of hetero-junction is supported by high resolution transmission electron microscopy. 2011 Materials Research Society.
10.1557/opl.2011.1153
Grant Details