Peer-Reviewed Journal Details
Mandatory Fields
Riza, Mehdi; Hao, Guangbo
2019
August
Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems
A flexure motion stage system for light beam control
Published
Scopus: 2 ()
Optional Fields
25
8
3185
3191
This paper presents the design of an improved tip-tilt-piston compliant/flexure motion stage for steering light beam. The motion stage is actuated by three linear stepper motors in an open-loop control. Using a laser and optical setup, the completed device was tested by making it steer a laser beam, effectively demonstrating its range of movement and level of precision. The testing has proved that the new motion stage system has a maximum bidirectional rotation range of at least 2.89 with a precision and repeatability of 0.0213, demonstrating a micro-positioning ability.
0946-7076
10.1007/s00542-018-4168-8
Grant Details