Other Publication Details
Mandatory Fields
Reviews
Duffy R.;Shayesteh M.;Yu R.
2014
January
Processing of germanium for integrated circuits
Validated
1
Scopus: 2 ()
Optional Fields
Dielectrics Field-effect-transistors Germanium Integration Processing Resistance Semiconductors Substrates
© TÜB¯TAK. In this review paper the authors will focus on Ge processing for integrated circuits. The key areas that require the most attention are substrates and integration, gate dielectrics, and access resistance. We will discuss each of these topics in turn, while also reviewing the most scaled Ge field-effect-transistor devices, and consider how modelling activities have matured for Ge in recent years.
1300-0101
463
477
10.3906/fiz-1405-2
Grant Details