Peer-Reviewed Journal Details
Mandatory Fields
Duffy, R. and Thomas, K. and Galluccio, E. and Mirabelli, G. and Sultan, M. and Kennedy, N. and Petkov, N. and Maxwell, G. and Hydes, A. and O'Connell, D. and Lyons, C. and Sheehan, B. and Schmidt, M. and Holmes, J.D. and Hurley, P.K. and Pelucchi, E. and Connolly, J. and Hatem, C. and Long, B.
2018
January
AsH 3 gas-phase ex situ doping 3D silicon structures
Validated
Optional Fields
124
4
https://www.scopus.com/inward/record.uri?eid=2-s2.0-85050802410&doi=10.1063%2f1.5034213&partnerID=40&md5=5e130ee7430a82643a10984872ce1ccd
10.1063/1.5034213
Grant Details