Duffy, R.;Thomas, K.;Galluccio, E.;Mirabelli, G.;Sultan, M.;Kennedy, N.;Petkov, N.;Maxwell, G.;Hydes, A.;O'Connell, D.;Lyons, C.;Sheehan, B.;Schmidt, M.;Holmes, J. D.;Hurley, P. K.;Pelucchi, E.;Connolly, J.;Hatem, C.;Long, B.;

2018

Journal of Applied Physics

AsH3 gas-phase ex situ doping 3D silicon structures

Validated

()

10.1063/1.5034213